Research field

Precision metrology and testing: interferometry, grating fabrication

Research survey

The main researches include fabrication technology of large scale grating, ion beam etching and real-time monitoring technology, fabrication of grating, nondestructive testing of grating mask, grating parameter, high precision measurement, etc.. It also includes the application of grating in metrology, such as two dimensional grating ruler, grating based heterodyne modulation technique, heterodyne Fu Liye transform spectrometer, etc..