Chao WangProfessor

Institute of Instrument Science and Technology

Telephone:+86 010-62787827

E-mail:

Profile

Professor Chao Wang is a faculty member of the Department of Precision Instrument at Tsinghua University. He is a recipient of the National High-Level Talent Program. His research focuses on high-precision online monitoring techniques and instrumentation for complex high-temperature and dynamic environments, with particular applications in the measurement of critical parameters in integrated circuit manufacturing and health monitoring of turbine rotor blades.

He has published over 100 SCI-indexed papers in leading international journals, including Light: Science & Applications and Advanced Energy Materials, and holds over 100 granted patents in China and abroad, including 14 U.S. patents. He has served as principal investigator for more than 10 research projects at the national, provincial, and ministerial levels, including a Major Research Instrument Development Project funded by the National Natural Science Foundation of China (NSFC).

His honors include the 15th China Youth Science and Technology Award, the First Prize for Technological Invention from the Chinese Institute of Electronics, and the First Prize for Natural Science of Sichuan Province. He was listed as the first-ranked recipient of both first-prize awards.

Educational Experience

Work Experience

  • 1996.9 ~ 2000.7

    Department of Mechanical Engineering, Tsinghua University, B. S.

  • 2000.9 ~ 2003.7

    Department of Mechanical Engineering, Tsinghua University, M. S

  • 2004.10 ~ 2008.10

    Department of Materials, University of Oxford, Ph. D.

  • 2003.7 ~ 2004.8

    Semiconductor Manufacturing International Corporation, Engineer

  • 2008.6 ~ 2012.6

    Applied Materials, Inc., Engineer/CTO officer of China

  • 2012.6 ~ 2021.11

    University of Electronic Science and Technology of China, Professor

  • 2021.12 ~ Now

    Department of precision instrument, Tsinghua University, Professor, Doctoral supervisor

Research Group

CME Research Group

Research Field

Professor Chao Wang has long been engaged in the research of high-precision and high-speed monitoring technology and instrument in the high temperature dynamic complex environment. The developed instruments have been applied in the monitoring of key parameters in the integrated circuit manufacture and turbine rotor blades.