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清华大学精密仪器系，国家高层次人才计划入选者。长期从事高温动态复杂环境下的高精度在线监测方法研究及仪器制造，重点应用于集成电路芯片制造中的关键参数监测以及航空发动机涡轮转子叶片的健康监测。授权美国专利7项和中国发明专利71项；发表SCI学术论文98篇，Google学术引用2700余次；主持国家自然科学基金重大科研仪器研制项目等省部级以上项目10余项；获第十五届中国青年科技奖，并以第一完成人获中国电子学会技术发明一等奖、四川省自然科学一等奖等。
Department of Mechanical Engineering, Tsinghua University, B. S.
Department of Mechanical Engineering, Tsinghua University, M. S
Department of Materials, University of Oxford, Ph. D.
Semiconductor Manufacturing International Corporation, Engineer
Applied Materials, Inc., Engineer/CTO officer of China
University of Electronic Science and Technology of China, Professor
Department of precision instrument, Tsinghua University, Professor, Doctoral supervisor
Professor Chao Wang has long been engaged in the research of high-precision and high-speed monitoring technology and instrument in the high temperature dynamic complex environment. The developed instruments have been applied in the monitoring of key parameters in the integrated circuit manufacture and turbine rotor blades of aero-engines. There are 7 US invention patents and 62 China invention patents granted. 83 SCI indexed articles have been published with more than 2700 Google Scholar citations. Pro. Wang has been funded by more than 10 projects including National Major Scientific Research Equipment Project of NSFC and awarded the 15th China Youth Science and Technology Award.
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