Grating fabrication and measurement
The entire research, design, and fabrication process of holographic gratings. Among them, by improving, adjusting, and optimizing the grating system, it is made suitable for fabricating high-quality long-period holographic gratings, which are applied in the field of precision metrology. The grating displacement (grating scale) is a typical application of holographic gratings. The development of a complete set of grating scales based on holographic gratings is suitable for high-precision high-resolution displacement measurement applications such as photolithography machines and precision machining.
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