Wu GuanhaoProfessor

institute of Opto-Electronic Engineering

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Research

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Grating fabrication and measurement

Release time:2020-07-20
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The entire research, design, and fabrication process of holographic gratings. Among them, by improving, adjusting, and optimizing the grating system, it is made suitable for fabricating high-quality long-period holographic gratings, which are applied in the field of precision metrology. The grating displacement (grating scale) is a typical application of holographic gratings. The development of a complete set of grating scales based on holographic gratings is suitable for high-precision high-resolution displacement measurement applications such as photolithography machines and precision machining.