新闻动态

Technology development on phase measuring deflectometry

Accurate and high dynamic range measurement of the three attitude variations (i.e. displacement, pitch and yaw angles) has been widely researched based on various approaches to meet different application requirements. We developed the simultaneous measurement method of displacement, pitch and yaw angles of cavity output mirror, based on classical phase measuring deflectometry (PMD) system and a double iteration algorithm (DIA). The relationship between the attitude variations and the lateral displacement parameters (LDP) of the imaged structural fringes is derived in the PMD system. Through the established relationship, the attitude variations could be calculated once the LDP are detected. Furthermore, a two-step measuring scheme combining the four-step shifting phase and the color-coded fringe is proposed to effectively detect the LDP. Finally, an experiment is conducted to verify the feasibility of the proposed method.